Embroiled for some time now in legal disputes concerning immersion lithography, ASML, Carl Zeiss, and Nikon, this week signed a memorandum of understanding relating to a plan to once again settle those disputes and give all parties full access to the technology. Under the terms of the deal, Nikon will get a one-time payment in cash, and the three companies will sign a cross-licensing agreement that contemplates mutual royalty payments for 10 years.

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